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Silicon Etchants

Nitric Acid Etching Mixture (17383)

SWF 200-600-200, VLSI Puranal

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • No data available
  • Color
    • Colorless to Yellowish
  • Density
    • 1.12 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • Partition Coefficient
    • No data available
  • pH
    • < 1
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible
  • Vapor Pressure
    • No data available

Safety Information

  • Corrosivity
    • Corrosive to metals
  • Flammability
    • Not applicable
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Evolution of toxic gases/vapours, Hydrogen by reaction with metals, Glass and silicate-containing materials are attacked
  • Oxidizing
    • The substance or mixture is not classified as oxidizing.
  • Self Ignition
    • Not auto-flammable
  • Thermal Decomposition
    • To avoid thermal decomposition, do not overheat.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • No data available
  • Color
    • Colorless to Yellowish
  • Density
    • 1.12 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • Partition Coefficient
    • No data available
  • pH
    • < 1
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible
  • Vapor Pressure
    • No data available

Safety Information

  • Corrosivity
    • Corrosive to metals
  • Flammability
    • Not applicable
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Evolution of toxic gases/vapours, Hydrogen by reaction with metals, Glass and silicate-containing materials are attacked
  • Oxidizing
    • The substance or mixture is not classified as oxidizing.
  • Self Ignition
    • Not auto-flammable
  • Thermal Decomposition
    • To avoid thermal decomposition, do not overheat.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922
  • Grade : VLSI
  • Partition Coefficient : No data available
  • Melting Point/Range : No data available
  • Solubility in Water : Completely miscible
  • Boiling Point/Range : No data available
  • Color : Colorless to Yellowish
  • Flashpoint : Not applicable
  • Physical Form : Liquid
  • Density : 1.12 g/cm3 (20 °C)
  • Vapor Pressure : No data available
  • pH : < 1
  • Odor : Stinging
  • Thermal Decomposition : To avoid thermal decomposition, do not overheat.
  • Ignition Temperature : Not applicable
  • Self Ignition : Not auto-flammable
  • Incompatible Materials : Evolution of toxic gases/vapours, Hydrogen by reaction with metals, Glass and silicate-containing materials are attacked
  • Oxidizing : The substance or mixture is not classified as oxidizing.
  • Corrosivity : Corrosive to metals
  • Flammability : Not applicable
  • Sub Class 1 : 6.1
  • Chemical Class : 8
  • UN Number : 2922
  • Harmonized System Code : 38249996
  • Packing Group : II
Property
Value
particles > 0,5 µm
Max. 250 P/ml
assay of HNO3
17.0 - 18.0 %
assay of HF
9.5 - 11.0 %
silver (Ag)
Max. 0.02 ppm
aluminium (Al)
Max. 0.05 ppm
arsenic (As)
Max. 0.01 ppm
gold (Au)
Max. 0.02 ppm
barium (Ba)
Max. 0.10 ppm
beryllium (Be)
Max. 0.02 ppm
bismuth (Bi)
Max. 0.02 ppm
calcium (Ca)
Max. 0.10 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.05 ppm
copper (Cu)
Max. 0.01 ppm
iron (Fe)
Max. 0.10 ppm
gallium (Ga)
Max. 0.02 ppm
indium (In)
Max. 0.02 ppm
potassium (K)
Max. 0.10 ppm
lithium (Li)
Max. 0.02 ppm
magnesium (Mg)
Max. 0.10 ppm
manganese (Mn)
Max. 0.01 ppm
molybdenum (Mo)
Max. 0.05 ppm
sodium (Na)
Max. 0.30 ppm
nickel (Ni)
Max. 0.02 ppm
lead (Pb)
Max. 0.02 ppm
platinum (Pt)
Max. 0.02 ppm
tin (Sn)
Max. 0.02 ppm
strontium (Sr)
Max. 0.02 ppm
titanium (Ti)
Max. 0.01 ppm
thallium (Tl)
Max. 0.02 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.05 ppm
zirconium (Zr)
Max. 0.01 ppm
chloride (Cl)
Max. 0.2 ppm
phosphate (PO4)
Max. 0.10 ppm
sulfate (SO4)
Max. 0.50 ppm