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Buffered Oxide Etchants

Etching Mixture PSF (17673)

500-250(65)-250(40) Puranal

General Information

  • Grade
    • VLSI

Physical Properties

  • Partition Coefficient
    • No data available
  • Melting Point/Range
    • Not Determined
  • Solubility in Water
    • Completely miscible
  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Flashpoint
    • Not applicable
  • Physical Form
    • Liquid
  • Density
    • 1.490 g/cm3 (20 °C)
  • Vapor Pressure
    • similar to water
  • pH
    • Acidic
  • Odor
    • Stinging

Safety Information

  • Thermal Decomposition
    • No decomposition if used as directed.
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Hydrogen by reaction with metals, Glass and silicate-containing materials are attacked
  • Corrosivity
    • Corrosive to metals
  • Oxidizing
    • The substance or mixture is not classified as oxidizing.
  • Chemical Stability
    • No decomposition if stored and applied as directed.
  • Flammability
    • Not applicable

International Transportation

  • Sub Class 1
    • 6.1
  • UN Number
    • 2922
  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II

General Information

  • Grade
    • VLSI

Physical Properties

  • Partition Coefficient
    • No data available
  • Melting Point/Range
    • Not Determined
  • Solubility in Water
    • Completely miscible
  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Flashpoint
    • Not applicable
  • Physical Form
    • Liquid
  • Density
    • 1.490 g/cm3 (20 °C)
  • Vapor Pressure
    • similar to water
  • pH
    • Acidic
  • Odor
    • Stinging

Safety Information

  • Thermal Decomposition
    • No decomposition if used as directed.
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Hydrogen by reaction with metals, Glass and silicate-containing materials are attacked
  • Corrosivity
    • Corrosive to metals
  • Oxidizing
    • The substance or mixture is not classified as oxidizing.
  • Chemical Stability
    • No decomposition if stored and applied as directed.
  • Flammability
    • Not applicable

International Transportation

  • Sub Class 1
    • 6.1
  • UN Number
    • 2922
  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Grade : VLSI
  • Partition Coefficient : No data available
  • Melting Point/Range : Not Determined
  • Solubility in Water : Completely miscible
  • Boiling Point/Range : > 100 °C (1,013 hPa)
  • Color : Colorless
  • Flashpoint : Not applicable
  • Physical Form : Liquid
  • Density : 1.490 g/cm3 (20 °C)
  • Vapor Pressure : similar to water
  • pH : Acidic
  • Odor : Stinging
  • Thermal Decomposition : No decomposition if used as directed.
  • Ignition Temperature : Not applicable
  • Incompatible Materials : Hydrogen by reaction with metals, Glass and silicate-containing materials are attacked
  • Corrosivity : Corrosive to metals
  • Oxidizing : The substance or mixture is not classified as oxidizing.
  • Chemical Stability : No decomposition if stored and applied as directed.
  • Flammability : Not applicable
  • Sub Class 1 : 6.1
  • UN Number : 2922
  • Chemical Class : 8
  • Harmonized System Code : 38249996
  • Packing Group : II