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Buffered Oxide Etchants

Etching Mixture Electronic Grade (49227)

Puranal

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Physical Properties

  • Melting Point/Range
    • No data available
  • Boiling Point/Range
    • 100 °C 1,013 hPa
  • Color
    • Colorless
  • pH
    • Acidic
  • Odor
    • Odorless
  • Physical Form
    • Liquid
  • Flashpoint
    • Not applicable

Safety Information

  • Ignition Temperature
    • Not applicable
  • Corrosivity
    • Corrosive to metals
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Chemical Stability
    • Stable under normal conditions.
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Packing Group
    • II
  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • UN Number
    • 3264

Physical Properties

  • Melting Point/Range
    • No data available
  • Boiling Point/Range
    • 100 °C 1,013 hPa
  • Color
    • Colorless
  • pH
    • Acidic
  • Odor
    • Odorless
  • Physical Form
    • Liquid
  • Flashpoint
    • Not applicable

Safety Information

  • Ignition Temperature
    • Not applicable
  • Corrosivity
    • Corrosive to metals
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Chemical Stability
    • Stable under normal conditions.
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Packing Group
    • II
  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • UN Number
    • 3264
  • Melting Point/Range : No data available
  • Boiling Point/Range : 100 °C 1,013 hPa
  • Color : Colorless
  • pH : Acidic
  • Odor : Odorless
  • Physical Form : Liquid
  • Flashpoint : Not applicable
  • Ignition Temperature : Not applicable
  • Corrosivity : Corrosive to metals
  • Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Chemical Stability : Stable under normal conditions.
  • Thermal Decomposition : No decomposition if used as directed.
  • Packing Group : II
  • Chemical Class : 8
  • Harmonized System Code : 38249996
  • UN Number : 3264
Property
Value
assay hydrofluoric acid (HF)
4.05 - 4.25 %
assay of NH4F
32.5 - 33.5 %
etch rate (nm/min)
63 - 71 nm/min
residue on ignition (SO4)
Max. 10 ppm
silver (Ag)
Max. 0.020 ppm
aluminium (Al)
Max. 0.050 ppm
arsenic, antimony (as As)
Max. 0.010 ppm
gold (Au)
Max. 0.005 ppm
boron (B)
Max. 0.050 ppm
barium (Ba)
Max. 0.010 ppm
beryllium (Be)
Max. 0.010 ppm
bismuth (Bi)
Max. 0.020 ppm
calcium (Ca)
Max. 0.100 ppm
cadmium (Cd)
Max. 0.010 ppm
cobalt (Co)
Max. 0.010 ppm
chromium (Cr)
Max. 0.010 ppm
copper (Cu)
Max. 0.010 ppm
iron (Fe)
Max. 0.020 ppm
gallium (Ga)
Max. 0.010 ppm
indium (In)
Max. 0.010 ppm
potassium (K)
Max. 0.050 ppm
lithium (Li)
Max. 0.010 ppm
magnesium (Mg)
Max. 0.050 ppm
manganese (Mn)
Max. 0.010 ppm
molybdenum (Mo)
Max. 0.010 ppm
sodium (Na)
Max. 0.025 ppm
nickel (Ni)
Max. 0.010 ppm
lead (Pb)
Max. 0.005 ppm
platinum (Pt)
Max. 0.050 ppm
tin (Sn)
Max. 0.020 ppm
strontium (Sr)
Max. 0.010 ppm
titanium (Ti)
Max. 0.010 ppm
thallium (Tl)
Max. 0.020 ppm
vanadium (V)
Max. 0.010 ppm
zinc (Zn)
Max. 0.035 ppm
zirconium (Zr)
Max. 0.010 ppm
chloride (Cl)
Max. 2.0 ppm
phosphate (PO4)
Max. 0.50 ppm
sulfate (SO4)
Max. 2.0 ppm