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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (21313)

AWAP 750-200-50 VLSI

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General Information

  • Grade
    • VLSI

Physical Properties

  • Density
    • 1.100 g/cm3 20 °C
  • Flashpoint
    • Not applicable
  • Solubility in Water
    • Completely miscible
  • Physical Form
    • Liquid
  • Melting Point/Range
    • No data available
  • Boiling Point/Range
    • 100 °C 1,013 hPa
  • Odor
    • Odorless
  • Color
    • Colorless

Safety Information

  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Chemical Stability
    • Stable under normal conditions.

International Transportation

  • Chemical Class
    • 6.1
  • UN Number
    • 3287
  • Harmonized System Code
    • 38249996
  • Packing Group
    • III

General Information

  • Grade
    • VLSI

Physical Properties

  • Density
    • 1.100 g/cm3 20 °C
  • Flashpoint
    • Not applicable
  • Solubility in Water
    • Completely miscible
  • Physical Form
    • Liquid
  • Melting Point/Range
    • No data available
  • Boiling Point/Range
    • 100 °C 1,013 hPa
  • Odor
    • Odorless
  • Color
    • Colorless

Safety Information

  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Chemical Stability
    • Stable under normal conditions.

International Transportation

  • Chemical Class
    • 6.1
  • UN Number
    • 3287
  • Harmonized System Code
    • 38249996
  • Packing Group
    • III
  • Grade : VLSI
  • Density : 1.100 g/cm3 20 °C
  • Flashpoint : Not applicable
  • Solubility in Water : Completely miscible
  • Physical Form : Liquid
  • Melting Point/Range : No data available
  • Boiling Point/Range : 100 °C 1,013 hPa
  • Odor : Odorless
  • Color : Colorless
  • Ignition Temperature : Not applicable
  • Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Chemical Stability : Stable under normal conditions.
  • Chemical Class : 6.1
  • UN Number : 3287
  • Harmonized System Code : 38249996
  • Packing Group : III
Property
Value
particles > 0,5 µm
Max. 250 P/ml
ammonium fluoride (NH4F)
30.2 - 31.2 %
ammonium dihydrogen phosphate (NH4H2PO4)
4.4 - 4.8 %
silver (Ag)
Max. 0.05 ppm
aluminium (Al)
Max. 0.05 ppm
gold (Au)
Max. 0.02 ppm
boron (B)
Max. 0.05 ppm
barium (Ba)
Max. 0.01 ppm
beryllium (Be)
Max. 0.01 ppm
bismuth (Bi)
Max. 0.02 ppm
calcium (Ca)
Max. 0.10 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.01 ppm
copper (Cu)
Max. 0.01 ppm
iron (Fe)
Max. 0.05 ppm
gallium (Ga)
Max. 0.01 ppm
germanium (Ge)
Max. 0.05 ppm
indium (In)
Max. 0.01 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.01 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.01 ppm
molybdenum (Mo)
Max. 0.01 ppm
sodium (Na)
Max. 0.10 ppm
nickel (Ni)
Max. 0.01 ppm
lead (Pb)
Max. 0.01 ppm
platinum (Pt)
Max. 0.05 ppm
tin (Sn)
Max. 0.02 ppm
strontium (Sr)
Max. 0.01 ppm
titanium (Ti)
Max. 0.01 ppm
thallium (Tl)
Max. 0.02 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.05 ppm
zirconium (Zr)
Max. 0.01 ppm
chloride (Cl)
Max. 4.0 ppm
sulfate (SO4)
Max. 2.0 ppm