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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (17323)

AF 91-9, ULSI Puranal (BOE 10:1)

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Physical Properties

  • Flashpoint
    • Not applicable
  • Odor
    • Stinging
  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Physical Form
    • Liquid
  • Melting Point/Range
    • No data available
  • pH
    • Acidic
  • Color
    • Colorless

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal

International Transportation

  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264
  • Chemical Class
    • 8

Physical Properties

  • Flashpoint
    • Not applicable
  • Odor
    • Stinging
  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Physical Form
    • Liquid
  • Melting Point/Range
    • No data available
  • pH
    • Acidic
  • Color
    • Colorless

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal

International Transportation

  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264
  • Chemical Class
    • 8
  • Flashpoint : Not applicable
  • Odor : Stinging
  • Boiling Point/Range : 100 °C (1,013 hPa)
  • Physical Form : Liquid
  • Melting Point/Range : No data available
  • pH : Acidic
  • Color : Colorless
  • Chemical Stability : Stable under normal conditions.
  • Corrosivity : Corrosive to metals
  • Ignition Temperature : Not applicable
  • Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Harmonized System Code : 38249996
  • Packing Group : II
  • UN Number : 3264
  • Chemical Class : 8
Property
Value
particles > 0,2 µm
Max. 250 P/ml
particles > 0,5 µm
Max. 30 P/ml
ammonium fluoride (NH4F)
35.7 - 36.3 %
assay hydrofluoric acid (HF)
4.5 - 4.7 %
aluminium (Al)
Max. 10 ppb
calcium (Ca)
Max. 10 ppb
iron (Fe)
Max. 10 ppb
potassium (K)
Max. 10 ppb
sodium (Na)
Max. 10 ppb
zinc (Zn)
Max. 10 ppb