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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (17249)

AF 875-125 (BOE 8:1) LST, VLSI Puranal

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • 100 °C
  • Color
    • Colorless
  • Density
    • 1.12 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • Partition Coefficient
    • No data available
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible
  • Vapor Pressure
    • similar to water

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Flammability
    • Not applicable
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Oxidizing
    • The substance or mixture is not classified as oxidizing.
  • Self Ignition
    • Not auto-flammable
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • 100 °C
  • Color
    • Colorless
  • Density
    • 1.12 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • Partition Coefficient
    • No data available
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible
  • Vapor Pressure
    • similar to water

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Flammability
    • Not applicable
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Oxidizing
    • The substance or mixture is not classified as oxidizing.
  • Self Ignition
    • Not auto-flammable
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264
  • Grade : VLSI
  • Partition Coefficient : No data available
  • Melting Point/Range : No data available
  • Solubility in Water : Completely miscible
  • Boiling Point/Range : 100 °C
  • Color : Colorless
  • Flashpoint : Not applicable
  • Physical Form : Liquid
  • Density : 1.12 g/cm3 (20 °C)
  • Vapor Pressure : similar to water
  • pH : Acidic
  • Odor : Stinging
  • Thermal Decomposition : No decomposition if used as directed.
  • Self Ignition : Not auto-flammable
  • Ignition Temperature : Not applicable
  • Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Corrosivity : Corrosive to metals
  • Oxidizing : The substance or mixture is not classified as oxidizing.
  • Chemical Stability : Stable under normal conditions.
  • Flammability : Not applicable
  • Chemical Class : 8
  • UN Number : 3264
  • Harmonized System Code : 38249996
  • Packing Group : II
Property
Value
particles > 0,5 µm
Max. 250 P/ml
particles > 5 µm
Max. 2 P/ml
surface tension
Max. 31 mN/m
ammonium fluoride (NH4F)
34.3 - 35.3 %
assay hydrofluoric acid (HF)
6.4 - 6.6 %
residue on ignition (SO4)
Max. 10 ppm
silver (Ag)
Max. 0.01 ppm
aluminium (Al)
Max. 0.05 ppm
arsenic (As)
Max. 0.03 ppm
gold (Au)
Max. 0.02 ppm
boron (B)
Max. 0.05 ppm
barium (Ba)
Max. 0.01 ppm
beryllium (Be)
Max. 0.01 ppm
bismuth (Bi)
Max. 0.02 ppm
calcium (Ca)
Max. 0.1 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.01 ppm
copper (Cu)
Max. 0.01 ppm
iron (Fe)
Max. 0.05 ppm
gallium (Ga)
Max. 0.01 ppm
germanium (Ge)
Max. 0.05 ppm
indium (In)
Max. 0.01 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.01 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.01 ppm
molybdenum (Mo)
Max. 0.01 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.01 ppm
lead (Pb)
Max. 0.01 ppm
platinum (Pt)
Max. 0.05 ppm
silicon (Si)
Max. 200 ppm
tin (Sn)
Max. 0.02 ppm
strontium (Sr)
Max. 0.01 ppm
titanium (Ti)
Max. 0.01 ppm
thallium (Tl)
Max. 0.02 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.05 ppm
zirconium (Zr)
Max. 0.01 ppm
chloride (Cl)
Max. 2 ppm
nitrate (NO3)
Max. 10 ppm
phosphate (PO4)
Max. 0.2 ppm
sulfate (SO4)
Max. 2 ppm