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Spin-on Glass (SOG)

Phosphosilicate - P-5S

The ACCUGLASS P-5S (κ=4.7) Spin-on Glass (SOG) is a phosphosilicate polymer used for metal and poly planarization, overcoat passivation, and non-etchback

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Name
Description
File Size
Date
Size
ILD and PMD planarization
application/pdf 578.67 KB
6/18/2021
578.67 KB
ILD and PMD planarization
application/pdf 578.67 KB
9/14/2022
578.67 KB
Name
Description
File Size
Date
Size
ILD and PMD planarization
578.67 KB
6/18/2021
578.67 KB
ILD and PMD planarization
578.67 KB
9/14/2022
578.67 KB
Name
Description
File Size
Date
Size
ILD and PMD planarization
578.67 KB
6/18/2021
ILD and PMD planarization
578.67 KB
9/14/2022