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Selective Etchants

Backside Etch 1 (17064)

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • No data available
  • Color
    • Colorless to Yellowish
  • Density
    • 1.47 g/cm3
  • Flashpoint
    • Does not flash
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • pH
    • 1
  • Physical Form
    • Liquid
  • Solubility in Water
    • Soluble

Safety Information

  • Corrosivity
    • Corrosive to metals
  • Incompatible Materials
    • Corrosive in contact with metals, Glass and silicate-containing materials are attacked, Reactions with strong alkalies
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • No data available
  • Color
    • Colorless to Yellowish
  • Density
    • 1.47 g/cm3
  • Flashpoint
    • Does not flash
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • pH
    • 1
  • Physical Form
    • Liquid
  • Solubility in Water
    • Soluble

Safety Information

  • Corrosivity
    • Corrosive to metals
  • Incompatible Materials
    • Corrosive in contact with metals, Glass and silicate-containing materials are attacked, Reactions with strong alkalies
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922
  • Grade : VLSI
  • Melting Point/Range : No data available
  • Solubility in Water : Soluble
  • Boiling Point/Range : No data available
  • Color : Colorless to Yellowish
  • Flashpoint : Does not flash
  • Physical Form : Liquid
  • Density : 1.47 g/cm3
  • pH : 1
  • Odor : Stinging
  • Thermal Decomposition : No decomposition if used as directed.
  • Incompatible Materials : Corrosive in contact with metals, Glass and silicate-containing materials are attacked, Reactions with strong alkalies
  • Corrosivity : Corrosive to metals
  • Sub Class 1 : 6.1
  • Chemical Class : 8
  • UN Number : 2922
  • Harmonized System Code : 38249996
  • Packing Group : II
Property
Value
assay of H2SO4
9.5 - 11.5 %
assay of phosphoric acid (H3PO4)
15.2 - 19.2 %
assay of HNO3
34.9 - 36.9 %
assay of HF
5.9 - 6.9 %
arsenic (As)
Max. 0.05 ppm
calcium (Ca)
Max. 2 ppm
cadmium (Cd)
Max. 0.05 ppm
cobalt (Co)
Max. 0.05 ppm
copper (Cu)
Max. 0.05 ppm
iron (Fe)
Max. 0.5 ppm
potassium (K)
Max. 0.3 ppm
magnesium (Mg)
Max. 0.1 ppm
manganese (Mn)
Max. 0.05 ppm
sodium (Na)
Max. 0.5 ppm
nickel (Ni)
Max. 0.2 ppm
lead (Pb)
Max. 0.05 ppm
antimony (Sb)
Max. 1 ppm
zinc (Zn)
Max. 0.1 ppm