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Metal Etchants

Sulfuric Acid Etching Mixture (17279)

SlWS 219-565-216 VLSI Puranal

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.34 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Odor
    • Stinging
  • Partition Coefficient
    • No data available
  • pH
    • < 1
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Corrosive in contact with metals, Hydrogen by reaction with metals
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.34 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Odor
    • Stinging
  • Partition Coefficient
    • No data available
  • pH
    • < 1
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Corrosive in contact with metals, Hydrogen by reaction with metals
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264
  • Grade : VLSI
  • Partition Coefficient : No data available
  • Solubility in Water : Completely miscible
  • Boiling Point/Range : > 100 °C (1,013 hPa)
  • Color : Colorless
  • Physical Form : Liquid
  • Flashpoint : Not applicable
  • Density : 1.34 g/cm3 (20 °C)
  • pH : < 1
  • Odor : Stinging
  • Thermal Decomposition : No decomposition if used as directed.
  • Ignition Temperature : Not applicable
  • Incompatible Materials : Corrosive in contact with metals, Hydrogen by reaction with metals
  • Corrosivity : Corrosive to metals
  • Chemical Class : 8
  • UN Number : 3264
  • Harmonized System Code : 38249996
  • Packing Group : II
Property
Value
particles > 0,5 µm
Max. 250 P/ml
assay of HNO3
16.1 - 16.9 %
assay of H2SO4
29.9 - 30.7 %
silver (Ag)
Max. 0.01 ppm
aluminium (Al)
Max. 0.03 ppm
gold (Au)
Max. 0.01 ppm
barium (Ba)
Max. 0.05 ppm
beryllium (Be)
Max. 0.01 ppm
bismuth (Bi)
Max. 0.01 ppm
calcium (Ca)
Max. 0.1 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.01 ppm
copper (Cu)
Max. 0.01 ppm
iron (Fe)
Max. 0.1 ppm
gallium (Ga)
Max. 0.01 ppm
indium (In)
Max. 0.01 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.01 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.01 ppm
molybdenum (Mo)
Max. 0.01 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.01 ppm
lead (Pb)
Max. 0.01 ppm
platinum (Pt)
Max. 0.01 ppm
antimony (Sb)
Max. 0.01 ppm
tin (Sn)
Max. 0.01 ppm
strontium (Sr)
Max. 0.01 ppm
titanium (Ti)
Max. 0.02 ppm
thallium (Tl)
Max. 0.01 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.03 ppm
zirconium (Zr)
Max. 0.01 ppm
chloride (Cl)
Max. 0.5 ppm
phosphate (PO4)
Max. 0.5 ppm