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Metal Etchants

Phosphoric Acid Etching Mixture (21482)

PWES 80-10-5-5 VLSI

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General Information

  • CAS Number
    • 7664-38-2

Physical Properties

  • pH
    • < 1 (20 °C)
  • Boiling Point/Range
    • > 100 °C
  • Color
    • Colorless
  • Flashpoint
    • Not applicable
  • Odor
    • Vinegar-Like
  • Partition Coefficient
    • No data available
  • Physical Form
    • Liquid

Safety Information

  • Incompatible Materials
    • Hydrogen by reaction with metals, Corrosive in contact with metals
  • Oxidizing
    • The substance or mixture is not classified as oxidizing.
  • Chemical Stability
    • No decomposition if stored and applied as directed.
  • Self Ignition
    • Not auto-flammable
  • Ignition Temperature
    • No data available
  • Corrosivity
    • Corrosive to metals
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • UN Number
    • 3264
  • Packing Group
    • II
  • Harmonized System Code
    • 38249996

General Information

  • CAS Number
    • 7664-38-2

Physical Properties

  • pH
    • < 1 (20 °C)
  • Boiling Point/Range
    • > 100 °C
  • Color
    • Colorless
  • Flashpoint
    • Not applicable
  • Odor
    • Vinegar-Like
  • Partition Coefficient
    • No data available
  • Physical Form
    • Liquid

Safety Information

  • Incompatible Materials
    • Hydrogen by reaction with metals, Corrosive in contact with metals
  • Oxidizing
    • The substance or mixture is not classified as oxidizing.
  • Chemical Stability
    • No decomposition if stored and applied as directed.
  • Self Ignition
    • Not auto-flammable
  • Ignition Temperature
    • No data available
  • Corrosivity
    • Corrosive to metals
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • UN Number
    • 3264
  • Packing Group
    • II
  • Harmonized System Code
    • 38249996
  • CAS Number : 7664-38-2
  • pH : < 1 (20 °C)
  • Boiling Point/Range : > 100 °C
  • Color : Colorless
  • Flashpoint : Not applicable
  • Odor : Vinegar-Like
  • Partition Coefficient : No data available
  • Physical Form : Liquid
  • Incompatible Materials : Hydrogen by reaction with metals, Corrosive in contact with metals
  • Oxidizing : The substance or mixture is not classified as oxidizing.
  • Chemical Stability : No decomposition if stored and applied as directed.
  • Self Ignition : Not auto-flammable
  • Ignition Temperature : No data available
  • Corrosivity : Corrosive to metals
  • Thermal Decomposition : No decomposition if used as directed.
  • Chemical Class : 8
  • UN Number : 3264
  • Packing Group : II
  • Harmonized System Code : 38249996
Property
Value
particles > 1 µm
Max. 25 P/ml
assay of phosphoric acid (H3PO4)
72.17 - 74.17 %
acetic acid (CH3COOH)
3.13 - 3.83 %
nitric acid
2.64 - 3.64 %
arsenic (As)
Max. 0.2 ppm
calcium (Ca)
Max. 15 ppm
copper (Cu)
Max. 1.2 ppm
iron (Fe)
Max. 6 ppm
potassium (K)
Max. 6 ppm
lithium (Li)
Max. 0.3 ppm
magnesium (Mg)
Max. 2 ppm
manganese (Mn)
Max. 0.2 ppm
sodium (Na)
Max. 10 ppm
nickel (Ni)
Max. 1 ppm
antimony (Sb)
Max. 15 ppm
strontium (Sr)
Max. 2 ppm
fluoride (F)
Max. 10 ppm