Metal Etchants
Phosphoric Acid Etching Mixture (21482)
PWES 80-10-5-5 VLSI
Overview
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Specifications
General Information
- Grade
- VLSI
- CAS Number
- 7664-38-2
Physical Properties
- pH
- < 1 (20 °C)
- Boiling Point/Range
- > 100 °C
- Color
- Colorless
- Flashpoint
- Not applicable
- Odor
- Vinegar-Like
- Partition Coefficient
- No data available
- Physical Form
- Liquid
- Density
- 1.59 g/cm3 (20 °C)
Safety Information
- Incompatible Materials
- Hydrogen by reaction with metals, Corrosive in contact with metals
- Oxidizing
- The substance or mixture is not classified as oxidizing.
- Chemical Stability
- No decomposition if stored and applied as directed.
- Self Ignition
- Not auto-flammable
- Ignition Temperature
- No data available
- Corrosivity
- Corrosive to metals
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- UN Number
- 3264
- Packing Group
- II
- Harmonized System Code
- 38249996
General Information
- Grade
- VLSI
- CAS Number
- 7664-38-2
Physical Properties
- pH
- < 1 (20 °C)
- Boiling Point/Range
- > 100 °C
- Color
- Colorless
- Flashpoint
- Not applicable
- Odor
- Vinegar-Like
- Partition Coefficient
- No data available
- Physical Form
- Liquid
- Density
- 1.59 g/cm3 (20 °C)
Safety Information
- Incompatible Materials
- Hydrogen by reaction with metals, Corrosive in contact with metals
- Oxidizing
- The substance or mixture is not classified as oxidizing.
- Chemical Stability
- No decomposition if stored and applied as directed.
- Self Ignition
- Not auto-flammable
- Ignition Temperature
- No data available
- Corrosivity
- Corrosive to metals
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- UN Number
- 3264
- Packing Group
- II
- Harmonized System Code
- 38249996
- Grade : VLSI
- CAS Number : 7664-38-2
- pH : < 1 (20 °C)
- Boiling Point/Range : > 100 °C
- Color : Colorless
- Flashpoint : Not applicable
- Odor : Vinegar-Like
- Partition Coefficient : No data available
- Physical Form : Liquid
- Density : 1.59 g/cm3 (20 °C)
- Incompatible Materials : Hydrogen by reaction with metals, Corrosive in contact with metals
- Oxidizing : The substance or mixture is not classified as oxidizing.
- Chemical Stability : No decomposition if stored and applied as directed.
- Self Ignition : Not auto-flammable
- Ignition Temperature : No data available
- Corrosivity : Corrosive to metals
- Thermal Decomposition : No decomposition if used as directed.
- Chemical Class : 8
- UN Number : 3264
- Packing Group : II
- Harmonized System Code : 38249996
Property
Value
particles > 1 µm
Max. 25 P/ml
assay of phosphoric acid (H3PO4)
72.17 - 74.17 %
acetic acid (CH3COOH)
3.13 - 3.83 %
nitric acid
2.64 - 3.64 %
arsenic (As)
Max. 0.2 ppm
calcium (Ca)
Max. 15 ppm
copper (Cu)
Max. 1.2 ppm
iron (Fe)
Max. 6 ppm
potassium (K)
Max. 6 ppm
lithium (Li)
Max. 0.3 ppm
magnesium (Mg)
Max. 2 ppm
manganese (Mn)
Max. 0.2 ppm
sodium (Na)
Max. 10 ppm
nickel (Ni)
Max. 1 ppm
antimony (Sb)
Max. 15 ppm
strontium (Sr)
Max. 2 ppm
fluoride (F)
Max. 10 ppm