Metal Etchants
Phosphoric Acid Etching Mixture (17225)
PES 68-14-04 VLSI Puranal
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General Information
- Grade
- VLSI
Physical Properties
- Color
- Colorless
- Density
- 1.510 g/cm3 20 °C
- Partition Coefficient
- No data available
- Boiling Point/Range
- > 100 °C 1,013 hPa
- Solubility in Water
- Completely miscible
- Odor
- Stinging
- pH
- Acidic
- Physical Form
- Liquid
- Flashpoint
- Not applicable
Safety Information
- Corrosivity
- Corrosive to metals
- Chemical Stability
- No decomposition if used as directed.
- Thermal Decomposition
- Fire or intense heat may cause violent rupture of packages.
- Incompatible Materials
- Corrosive in contact with metals, Hydrogen by reaction with metals
- Ignition Temperature
- Not applicable
International Transportation
- UN Number
- 3264
- Chemical Class
- 8
- Packing Group
- II
- Harmonized System Code
- 38249996
General Information
- Grade
- VLSI
Physical Properties
- Color
- Colorless
- Density
- 1.510 g/cm3 20 °C
- Partition Coefficient
- No data available
- Boiling Point/Range
- > 100 °C 1,013 hPa
- Solubility in Water
- Completely miscible
- Odor
- Stinging
- pH
- Acidic
- Physical Form
- Liquid
- Flashpoint
- Not applicable
Safety Information
- Corrosivity
- Corrosive to metals
- Chemical Stability
- No decomposition if used as directed.
- Thermal Decomposition
- Fire or intense heat may cause violent rupture of packages.
- Incompatible Materials
- Corrosive in contact with metals, Hydrogen by reaction with metals
- Ignition Temperature
- Not applicable
International Transportation
- UN Number
- 3264
- Chemical Class
- 8
- Packing Group
- II
- Harmonized System Code
- 38249996
- Grade : VLSI
- Color : Colorless
- Density : 1.510 g/cm3 20 °C
- Partition Coefficient : No data available
- Boiling Point/Range : > 100 °C 1,013 hPa
- Solubility in Water : Completely miscible
- Odor : Stinging
- pH : Acidic
- Physical Form : Liquid
- Flashpoint : Not applicable
- Corrosivity : Corrosive to metals
- Chemical Stability : No decomposition if used as directed.
- Thermal Decomposition : Fire or intense heat may cause violent rupture of packages.
- Incompatible Materials : Corrosive in contact with metals, Hydrogen by reaction with metals
- Ignition Temperature : Not applicable
- UN Number : 3264
- Chemical Class : 8
- Packing Group : II
- Harmonized System Code : 38249996
Property
Value
particles > 1 µm
Max. 512 P/ml
assay of phosphoric acid (H3PO4)
65.0 - 67.0 %
assay of acetic acid
9.0 - 10.0 %
assay of HNO3
2.1 - 2.5 %
arsenic (As)
Max. 0.5 ppm
calcium (Ca)
Max. 20.0 ppm
cadmium (Cd)
Max. 1.0 ppm
cobalt (Co)
Max. 1.0 ppm
copper (Cu)
Max. 2.0 ppm
iron (Fe)
Max. 10.0 ppm
potassium (K)
Max. 5.0 ppm
magnesium (Mg)
Max. 5.0 ppm
manganese (Mn)
Max. 0.5 ppm
sodium (Na)
Max. 10.0 ppm
nickel (Ni)
Max. 3.0 ppm
lead (Pb)
Max. 5.0 ppm
antimony (Sb)
Max. 5.0 ppm
zinc (Zn)
Max. 2.0 ppm
chloride (Cl)
Max. 1 ppm
sulfate (SO4)
Max. 30 ppm