Metal Etchants
Phosphoric Acid Etching Mixture (17225)
PES 68-14-04 VLSI Puranal
General Information
- Grade
- VLSI
Physical Properties
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.510 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Odor
- Stinging
- Partition Coefficient
- No data available
- pH
- Acidic
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- No decomposition if used as directed.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Hydrogen by reaction with metals
- Thermal Decomposition
- Fire or intense heat may cause violent rupture of packages.
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
General Information
- Grade
- VLSI
Physical Properties
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.510 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Odor
- Stinging
- Partition Coefficient
- No data available
- pH
- Acidic
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- No decomposition if used as directed.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Hydrogen by reaction with metals
- Thermal Decomposition
- Fire or intense heat may cause violent rupture of packages.
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
- Grade : VLSI
- Partition Coefficient : No data available
- Solubility in Water : Completely miscible
- Boiling Point/Range : > 100 °C (1,013 hPa)
- Color : Colorless
- Physical Form : Liquid
- Flashpoint : Not applicable
- Density : 1.510 g/cm3 (20 °C)
- pH : Acidic
- Odor : Stinging
- Thermal Decomposition : Fire or intense heat may cause violent rupture of packages.
- Ignition Temperature : Not applicable
- Incompatible Materials : Corrosive in contact with metals, Hydrogen by reaction with metals
- Corrosivity : Corrosive to metals
- Chemical Stability : No decomposition if used as directed.
- Chemical Class : 8
- UN Number : 3264
- Harmonized System Code : 38249996
- Packing Group : II
Property
Value
particles > 1 µm
Max. 512 P/ml
assay of phosphoric acid (H3PO4)
65.0 - 67.0 %
assay of acetic acid
9.0 - 10.0 %
assay of HNO3
2.1 - 2.5 %
arsenic (As)
Max. 0.5 ppm
calcium (Ca)
Max. 20.0 ppm
cadmium (Cd)
Max. 1.0 ppm
cobalt (Co)
Max. 1.0 ppm
copper (Cu)
Max. 2.0 ppm
iron (Fe)
Max. 10.0 ppm
potassium (K)
Max. 5.0 ppm
magnesium (Mg)
Max. 5.0 ppm
manganese (Mn)
Max. 0.5 ppm
sodium (Na)
Max. 10.0 ppm
nickel (Ni)
Max. 3.0 ppm
lead (Pb)
Max. 5.0 ppm
antimony (Sb)
Max. 5.0 ppm
zinc (Zn)
Max. 2.0 ppm
chloride (Cl)
Max. 1 ppm
sulfate (SO4)
Max. 30 ppm