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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture FWA (17270)

486-56-458 VLSI Puranal

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • 100 °C
  • Color
    • Colorless
  • Density
    • 1.13 g/cm3 (20 °C)
  • Flashpoint
    • Does not flash
  • Odor
    • Odorless
  • pH
    • 2.8 (20 °C) undiluted
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Corrosivity
    • Corrosive to metals
  • Incompatible Materials
    • Keep away from metals, Glass and silicate-containing materials are attacked
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922

General Information

  • Grade
    • VLSI

Physical Properties

  • Boiling Point/Range
    • 100 °C
  • Color
    • Colorless
  • Density
    • 1.13 g/cm3 (20 °C)
  • Flashpoint
    • Does not flash
  • Odor
    • Odorless
  • pH
    • 2.8 (20 °C) undiluted
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Corrosivity
    • Corrosive to metals
  • Incompatible Materials
    • Keep away from metals, Glass and silicate-containing materials are attacked
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922
  • Grade : VLSI
  • Solubility in Water : Completely miscible
  • Boiling Point/Range : 100 °C
  • Color : Colorless
  • Flashpoint : Does not flash
  • Physical Form : Liquid
  • Density : 1.13 g/cm3 (20 °C)
  • pH : 2.8 (20 °C) undiluted
  • Odor : Odorless
  • Thermal Decomposition : No decomposition if used as directed.
  • Incompatible Materials : Keep away from metals, Glass and silicate-containing materials are attacked
  • Corrosivity : Corrosive to metals
  • Sub Class 1 : 6.1
  • Chemical Class : 8
  • UN Number : 2922
  • Harmonized System Code : 38249996
  • Packing Group : II
Property
Value
assay hydrofluoric acid (HF)
24.5 - 25.5 %
ammonium fluoride (NH4F)
17.6 - 18.4 %
silver (Ag)
Max. 0.01 ppm
aluminium (Al)
Max. 0.1 ppm
arsenic (As)
Max. 0.02 ppm
gold (Au)
Max. 0.01 ppm
boron (B)
Max. 0.02 ppm
barium (Ba)
Max. 0.02 ppm
beryllium (Be)
Max. 0.01 ppm
bismuth (Bi)
Max. 0.02 ppm
calcium (Ca)
Max. 0.2 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.05 ppm
copper (Cu)
Max. 0.02 ppm
iron (Fe)
Max. 0.3 ppm
gallium (Ga)
Max. 0.01 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.01 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.02 ppm
molybdenum (Mo)
Max. 0.01 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.02 ppm
lead (Pb)
Max. 0.05 ppm
antimony (Sb)
Max. 0.01 ppm
tin (Sn)
Max. 0.02 ppm
strontium (Sr)
Max. 0.01 ppm
titanium (Ti)
Max. 0.01 ppm
thallium (Tl)
Max. 0.01 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.05 ppm
zirconium (Zr)
Max. 0.01 ppm