Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (21470)
AF 95-5 (20:1) ULSI
Overview
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Specifications
General Information
- Grade
- ULSI
Physical Properties
- Flashpoint
- Not applicable
- Density
- 1.110 g/cm3 (20 °C)
- pH
- Acidic
- Color
- Colorless
- Odor
- Odorless
- Melting Point/Range
- No data available
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Physical Form
- Liquid
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Ignition Temperature
- Not applicable
- Corrosivity
- Corrosive to metals
International Transportation
- Packing Group
- II
- Chemical Class
- 8
- Sub Class 1
- 6.1
- UN Number
- 2922
- Harmonized System Code
- 38249996
General Information
- Grade
- ULSI
Physical Properties
- Flashpoint
- Not applicable
- Density
- 1.110 g/cm3 (20 °C)
- pH
- Acidic
- Color
- Colorless
- Odor
- Odorless
- Melting Point/Range
- No data available
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Physical Form
- Liquid
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Ignition Temperature
- Not applicable
- Corrosivity
- Corrosive to metals
International Transportation
- Packing Group
- II
- Chemical Class
- 8
- Sub Class 1
- 6.1
- UN Number
- 2922
- Harmonized System Code
- 38249996
- Grade : ULSI
- Flashpoint : Not applicable
- Density : 1.110 g/cm3 (20 °C)
- pH : Acidic
- Color : Colorless
- Odor : Odorless
- Melting Point/Range : No data available
- Boiling Point/Range : 100 °C (1,013 hPa)
- Physical Form : Liquid
- Chemical Stability : Stable under normal conditions.
- Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Ignition Temperature : Not applicable
- Corrosivity : Corrosive to metals
- Packing Group : II
- Chemical Class : 8
- Sub Class 1 : 6.1
- UN Number : 2922
- Harmonized System Code : 38249996
Property
Value
ammonium fluoride (NH4F)
37.52 - 38.52 %
assay hydrofluoric acid (HF)
2.31 - 2.41 %
silver (Ag)
Max. 2 ppb
aluminium (Al)
Max. 10 ppb
gold (Au)
Max. 2 ppb
calcium (Ca)
Max. 10 ppb
chromium (Cr)
Max. 5 ppb
copper (Cu)
Max. 5 ppb
iron (Fe)
Max. 10 ppb
potassium (K)
Max. 10 ppb
lithium (Li)
Max. 2 ppb
magnesium (Mg)
Max. 10 ppb
sodium (Na)
Max. 10 ppb
nickel (Ni)
Max. 10 ppb
zinc (Zn)
Max. 5 ppb