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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (21470)

AF 95-5 (20:1) ULSI

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Physical Properties

  • Flashpoint
    • Not applicable
  • pH
    • Acidic
  • Color
    • Colorless
  • Odor
    • Odorless
  • Melting Point/Range
    • No data available
  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Physical Form
    • Liquid

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Ignition Temperature
    • Not applicable
  • Corrosivity
    • Corrosive to metals

International Transportation

  • Packing Group
    • II
  • Chemical Class
    • 8
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922
  • Harmonized System Code
    • 38249996

Physical Properties

  • Flashpoint
    • Not applicable
  • pH
    • Acidic
  • Color
    • Colorless
  • Odor
    • Odorless
  • Melting Point/Range
    • No data available
  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Physical Form
    • Liquid

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Ignition Temperature
    • Not applicable
  • Corrosivity
    • Corrosive to metals

International Transportation

  • Packing Group
    • II
  • Chemical Class
    • 8
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922
  • Harmonized System Code
    • 38249996
  • Flashpoint : Not applicable
  • pH : Acidic
  • Color : Colorless
  • Odor : Odorless
  • Melting Point/Range : No data available
  • Boiling Point/Range : 100 °C (1,013 hPa)
  • Physical Form : Liquid
  • Chemical Stability : Stable under normal conditions.
  • Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Ignition Temperature : Not applicable
  • Corrosivity : Corrosive to metals
  • Packing Group : II
  • Chemical Class : 8
  • Sub Class 1 : 6.1
  • UN Number : 2922
  • Harmonized System Code : 38249996
Property
Value
ammonium fluoride (NH4F)
37.52 - 38.52 %
assay hydrofluoric acid (HF)
2.31 - 2.41 %
silver (Ag)
Max. 2 ppb
aluminium (Al)
Max. 10 ppb
gold (Au)
Max. 2 ppb
calcium (Ca)
Max. 10 ppb
chromium (Cr)
Max. 5 ppb
copper (Cu)
Max. 5 ppb
iron (Fe)
Max. 10 ppb
potassium (K)
Max. 10 ppb
lithium (Li)
Max. 2 ppb
magnesium (Mg)
Max. 10 ppb
sodium (Na)
Max. 10 ppb
nickel (Ni)
Max. 10 ppb
zinc (Zn)
Max. 5 ppb