Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17807)
AWF 550-413-37 LST VLSI Puranal
General Information
- CAS Number
- 12125-01-8
- Grade
- VLSI
Physical Properties
- Boiling Point/Range
- 100 °C
- Color
- Colorless
- Density
- 1.066 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Incompatible Materials
- Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
General Information
- CAS Number
- 12125-01-8
- Grade
- VLSI
Physical Properties
- Boiling Point/Range
- 100 °C
- Color
- Colorless
- Density
- 1.066 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Incompatible Materials
- Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
- Grade : VLSI
- CAS Number : 12125-01-8
- Melting Point/Range : No data available
- Solubility in Water : Completely miscible
- Boiling Point/Range : 100 °C
- Color : Colorless
- Physical Form : Liquid
- Flashpoint : Not applicable
- Density : 1.066 g/cm3 (20 °C)
- Odor : Odorless
- Thermal Decomposition : No decomposition if used as directed.
- Incompatible Materials : Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Corrosivity : Corrosive to metals
- Chemical Stability : Stable under normal conditions.
- Chemical Class : 8
- UN Number : 3264
- Harmonized System Code : 38249996
- Packing Group : II
Property
Value
assay of NH4F
22.6 - 23.2 %
assay of HF
1.95 - 2.05 %
particles > 0,5 µm
Max. 200 P/ml
residue on ignition (SO4)
Max. 10 ppm
silver (Ag)
Max. 0.05 ppm
aluminium (Al)
Max. 0.1 ppm
arsenic, antimony (as As)
Max. 0.03 ppm
gold (Au)
Max. 0.05 ppm
barium (Ba)
Max. 0.1 ppm
bismuth (Bi)
Max. 0.1 ppm
calcium (Ca)
Max. 0.2 ppm
cadmium (Cd)
Max. 0.1 ppm
cobalt (Co)
Max. 0.05 ppm
chromium (Cr)
Max. 0.05 ppm
copper (Cu)
Max. 0.05 ppm
iron (Fe)
Max. 0.2 ppm
gallium (Ga)
Max. 0.05 ppm
indium (In)
Max. 0.05 ppm
potassium (K)
Max. 0.1 ppm
lithium (Li)
Max. 0.1 ppm
magnesium (Mg)
Max. 0.2 ppm
manganese (Mn)
Max. 0.05 ppm
molybdenum (Mo)
Max. 0.05 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.05 ppm
lead (Pb)
Max. 0.1 ppm
platinum (Pt)
Max. 0.05 ppm
antimony (Sb)
Max. 0.03 ppm
tin (Sn)
Max. 0.1 ppm
strontium (Sr)
Max. 0.1 ppm
titanium (Ti)
Max. 0.1 ppm
thallium (Tl)
Max. 0.05 ppm
zinc (Zn)
Max. 0.1 ppm
chloride (Cl)
Max. 4 ppm
sulfate (SO4)
Max. 2 ppm
phosphate (PO4)
Max. 0.2 ppm