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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (17381)

AF 95-5 (20:1) LST ULSI Puranal

General Information

  • CAS Number
    • 12125-01-8
  • Grade
    • ULSI

Physical Properties

  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.110 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Odorless
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922

General Information

  • CAS Number
    • 12125-01-8
  • Grade
    • ULSI

Physical Properties

  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.110 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Odorless
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922
  • Grade : ULSI
  • CAS Number : 12125-01-8
  • Melting Point/Range : No data available
  • Solubility in Water : Completely miscible
  • Boiling Point/Range : 100 °C (1,013 hPa)
  • Color : Colorless
  • Physical Form : Liquid
  • Flashpoint : Not applicable
  • Density : 1.110 g/cm3 (20 °C)
  • pH : Acidic
  • Odor : Odorless
  • Thermal Decomposition : No decomposition if used as directed.
  • Ignition Temperature : Not applicable
  • Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Corrosivity : Corrosive to metals
  • Chemical Stability : Stable under normal conditions.
  • Sub Class 1 : 6.1
  • Chemical Class : 8
  • UN Number : 2922
  • Harmonized System Code : 38249996
  • Packing Group : II
Property
Value
particles > 0,5 µm
Max. 170 P/ml
ammonium fluoride (NH4F)
37.5 - 38.5 %
assay hydrofluoric acid (HF)
2.3 - 2.5 %
surface tension
Max. 37 mN/m
residue on ignition (SO4)
Max. 40 ppm
silver (Ag)
Max. 2 ppb
aluminium (Al)
Max. 10 ppb
arsenic, antimony (as As)
Max. 0.05 ppm
gold (Au)
Max. 2 ppb
barium (Ba)
Max. 100 ppb
bismuth (Bi)
Max. 100 ppb
calcium (Ca)
Max. 10 ppb
cadmium (Cd)
Max. 100 ppb
cobalt (Co)
Max. 100 ppb
chromium (Cr)
Max. 5 ppb
copper (Cu)
Max. 5 ppb
iron (Fe)
Max. 10 ppb
gallium (Ga)
Max. 100 ppb
indium (In)
Max. 100 ppb
potassium (K)
Max. 10 ppb
lithium (Li)
Max. 2 ppb
magnesium (Mg)
Max. 10 ppb
manganese (Mn)
Max. 100 ppb
molybdenum (Mo)
Max. 100 ppb
sodium (Na)
Max. 10 ppb
nickel (Ni)
Max. 10 ppb
lead (Pb)
Max. 500 ppb
platinum (Pt)
Max. 50 ppb
tin (Sn)
Max. 100 ppb
strontium (Sr)
Max. 100 ppb
titanium (Ti)
Max. 100 ppb
thallium (Tl)
Max. 50 ppb
zinc (Zn)
Max. 5 ppb
chloride (Cl)
Max. 4 ppm
phosphate (PO4)
Max. 0.2 ppm
sulfate (SO4)
Max. 6 ppm