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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (17313)

AWAP 750-200-50 VLSI Puranal

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Physical Properties

  • Melting Point/Range
    • No data available
  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Physical Form
    • Liquid
  • Odor
    • Odorless
  • Flashpoint
    • Not applicable

Safety Information

  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Ignition Temperature
    • Not applicable
  • Chemical Stability
    • Stable under normal conditions.

International Transportation

  • Harmonized System Code
    • 38249996
  • Packing Group
    • III
  • UN Number
    • 3287
  • Chemical Class
    • 6.1

Physical Properties

  • Melting Point/Range
    • No data available
  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Physical Form
    • Liquid
  • Odor
    • Odorless
  • Flashpoint
    • Not applicable

Safety Information

  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Ignition Temperature
    • Not applicable
  • Chemical Stability
    • Stable under normal conditions.

International Transportation

  • Harmonized System Code
    • 38249996
  • Packing Group
    • III
  • UN Number
    • 3287
  • Chemical Class
    • 6.1
  • Melting Point/Range : No data available
  • Boiling Point/Range : 100 °C (1,013 hPa)
  • Color : Colorless
  • Physical Form : Liquid
  • Odor : Odorless
  • Flashpoint : Not applicable
  • Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Ignition Temperature : Not applicable
  • Chemical Stability : Stable under normal conditions.
  • Harmonized System Code : 38249996
  • Packing Group : III
  • UN Number : 3287
  • Chemical Class : 6.1
Property
Value
particles > 0,5 µm
Max. 250 P/ml
ammonium fluoride (NH4F)
30.2 - 31.2 %
ammonium dihydrogen phosphate (NH4H2PO4)
4.4 - 4.8 %
silver (Ag)
Max. 0.05 ppm
aluminium (Al)
Max. 0.05 ppm
gold (Au)
Max. 0.02 ppm
boron (B)
Max. 0.05 ppm
barium (Ba)
Max. 0.01 ppm
beryllium (Be)
Max. 0.01 ppm
bismuth (Bi)
Max. 0.02 ppm
calcium (Ca)
Max. 0.10 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.01 ppm
copper (Cu)
Max. 0.01 ppm
iron (Fe)
Max. 0.05 ppm
gallium (Ga)
Max. 0.01 ppm
germanium (Ge)
Max. 0.05 ppm
indium (In)
Max. 0.01 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.01 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.01 ppm
molybdenum (Mo)
Max. 0.01 ppm
sodium (Na)
Max. 0.10 ppm
nickel (Ni)
Max. 0.01 ppm
lead (Pb)
Max. 0.01 ppm
platinum (Pt)
Max. 0.05 ppm
tin (Sn)
Max. 0.02 ppm
strontium (Sr)
Max. 0.01 ppm
titanium (Ti)
Max. 0.01 ppm
thallium (Tl)
Max. 0.02 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.05 ppm
zirconium (Zr)
Max. 0.01 ppm
chloride (Cl)
Max. 4 ppm
sulfate (SO4)
Max. 2 ppm