Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17255)
AF 500-1 LST ULSI Puranal
Overview
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Specifications
General Information
- CAS Number
- 12125-01-8
- Grade
- ULSI
Physical Properties
- Partition Coefficient
- No data available
- Odor
- Odorless
- Physical Form
- Liquid
- Melting Point/Range
- No data available
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.11 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- pH
- 6.2 to 7.0 (20 °C)
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Ignition Temperature
- Not applicable
- Corrosivity
- Not corrosive to metals
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
International Transportation
- UN Number
- 3287
- Harmonized System Code
- 38249996
- Packing Group
- III
- Chemical Class
- 6.1
General Information
- CAS Number
- 12125-01-8
- Grade
- ULSI
Physical Properties
- Partition Coefficient
- No data available
- Odor
- Odorless
- Physical Form
- Liquid
- Melting Point/Range
- No data available
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.11 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- pH
- 6.2 to 7.0 (20 °C)
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Ignition Temperature
- Not applicable
- Corrosivity
- Not corrosive to metals
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
International Transportation
- UN Number
- 3287
- Harmonized System Code
- 38249996
- Packing Group
- III
- Chemical Class
- 6.1
- CAS Number : 12125-01-8
- Grade : ULSI
- Partition Coefficient : No data available
- Odor : Odorless
- Physical Form : Liquid
- Melting Point/Range : No data available
- Boiling Point/Range : > 100 °C (1,013 hPa)
- Color : Colorless
- Density : 1.11 g/cm3 (20 °C)
- Flashpoint : Not applicable
- pH : 6.2 to 7.0 (20 °C)
- Chemical Stability : Stable under normal conditions.
- Ignition Temperature : Not applicable
- Corrosivity : Not corrosive to metals
- Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- UN Number : 3287
- Harmonized System Code : 38249996
- Packing Group : III
- Chemical Class : 6.1
Property
Value
particles > 0,5 µm
Max. 125 P/ml
ammonium fluoride (NH4F)
39.40 - 40.40 %
assay hydrofluoric acid (HF)
0.085 - 0.135 %
surface tension
Max. 40 mN/m
Ship-to-Contr.Check surface tension
26 - 29 mN/m
residue on ignition (SO4)
Max. 10 ppm
silver (Ag)
Max. 10 ppb
aluminium (Al)
Max. 10 ppb
arsenic (As)
Max. 10 ppb
gold (Au)
Max. 10 ppb
boron (B)
Max. 10 ppb
barium (Ba)
Max. 10 ppb
bismuth (Bi)
Max. 10 ppb
calcium (Ca)
Max. 10 ppb
cadmium (Cd)
Max. 10 ppb
cobalt (Co)
Max. 10 ppb
chromium (Cr)
Max. 10 ppb
copper (Cu)
Max. 10 ppb
iron (Fe)
Max. 10 ppb
gallium (Ga)
Max. 10 ppb
indium (In)
Max. 10 ppb
potassium (K)
Max. 10 ppb
lithium (Li)
Max. 10 ppb
magnesium (Mg)
Max. 10 ppb
manganese (Mn)
Max. 10 ppb
molybdenum (Mo)
Max. 10 ppb
sodium (Na)
Max. 10 ppb
nickel (Ni)
Max. 10 ppb
lead (Pb)
Max. 10 ppb
platinum (Pt)
Max. 10 ppb
antimony (Sb)
Max. 10 ppb
tin (Sn)
Max. 10 ppb
strontium (Sr)
Max. 10 ppb
tantalum (Ta)
Max. 10 ppb
titanium (Ti)
Max. 10 ppb
thallium (Tl)
Max. 10 ppb
vanadium (V)
Max. 10 ppb
zinc (Zn)
Max. 10 ppb
zirconium (Zr)
Max. 10 ppb
chloride (Cl)
Max. 1 ppm
nitrate (NO3)
Max. 10 ppm
phosphate (PO4)
Max. 0.2 ppm
sulfate (SO4)
Max. 1 ppm