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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (17063)

AWF 560-349-91 ULSI Puranal

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Physical Properties

  • Color
    • Colorless
  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Melting Point/Range
    • No data available
  • Odor
    • Odorless
  • Physical Form
    • Liquid
  • pH
    • 5.0 to 6.0 (20 °C)
  • Flashpoint
    • Not applicable

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Thermal Decomposition
    • No decomposition if used as directed.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable

International Transportation

  • Packing Group
    • II
  • Chemical Class
    • 8
  • UN Number
    • 3264
  • Harmonized System Code
    • 38249996

Physical Properties

  • Color
    • Colorless
  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Melting Point/Range
    • No data available
  • Odor
    • Odorless
  • Physical Form
    • Liquid
  • pH
    • 5.0 to 6.0 (20 °C)
  • Flashpoint
    • Not applicable

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Thermal Decomposition
    • No decomposition if used as directed.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable

International Transportation

  • Packing Group
    • II
  • Chemical Class
    • 8
  • UN Number
    • 3264
  • Harmonized System Code
    • 38249996
  • Color : Colorless
  • Boiling Point/Range : > 100 °C (1,013 hPa)
  • Melting Point/Range : No data available
  • Odor : Odorless
  • Physical Form : Liquid
  • pH : 5.0 to 6.0 (20 °C)
  • Flashpoint : Not applicable
  • Chemical Stability : Stable under normal conditions.
  • Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Thermal Decomposition : No decomposition if used as directed.
  • Corrosivity : Corrosive to metals
  • Ignition Temperature : Not applicable
  • Packing Group : II
  • Chemical Class : 8
  • UN Number : 3264
  • Harmonized System Code : 38249996
Property
Value
assay of NH4F
22.8 - 23.4 %
assay of HF
4.70 - 5.10 %
particles > 0,2 µm
Max. 250 P/ml
particles > 0,5 µm
Max. 30 P/ml
silver (Ag)
Max. 5 ppb
aluminium (Al)
Max. 10 ppb
gold (Au)
Max. 5 ppb
arsenic (As)
Max. 5 ppb
boron (B)
Max. 10 ppb
barium (Ba)
Max. 10 ppb
beryllium (Be)
Max. 5 ppb
bismuth (Bi)
Max. 10 ppb
calcium (Ca)
Max. 10 ppb
cadmium (Cd)
Max. 5 ppb
cobalt (Co)
Max. 5 ppb
chromium (Cr)
Max. 10 ppb
copper (Cu)
Max. 10 ppb
iron (Fe)
Max. 10 ppb
germanium (Ge)
Max. 5 ppb
gallium (Ga)
Max. 5 ppb
potassium (K)
Max. 10 ppb
lithium (Li)
Max. 5 ppb
magnesium (Mg)
Max. 10 ppb
manganese (Mn)
Max. 10 ppb
molybdenum (Mo)
Max. 10 ppb
sodium (Na)
Max. 10 ppb
niobium (Nb)
Max. 5 ppb
nickel (Ni)
Max. 5 ppb
lead (Pb)
Max. 10 ppb
tin (Sn)
Max. 10 ppb
strontium (Sr)
Max. 5 ppb
tantalum (Ta)
Max. 10 ppb
titanium (Ti)
Max. 10 ppb
thallium (Tl)
Max. 5 ppb
vanadium (V)
Max. 5 ppb
zinc (Zn)
Max. 10 ppb
zirconium (Zr)
Max. 5 ppb