Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17063)
AWF 560-349-91 ULSI Puranal
Overview
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Specifications
General Information
- Grade
- ULSI
Physical Properties
- Color
- Colorless
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Melting Point/Range
- No data available
- Odor
- Odorless
- Physical Form
- Liquid
- pH
- 5.0 to 6.0 (20 °C)
- Density
- 1.080 g/cm3 (20 °C)
- Flashpoint
- Not applicable
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition
- No decomposition if used as directed.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
International Transportation
- Packing Group
- II
- Chemical Class
- 8
- UN Number
- 3264
- Harmonized System Code
- 38249996
General Information
- Grade
- ULSI
Physical Properties
- Color
- Colorless
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Melting Point/Range
- No data available
- Odor
- Odorless
- Physical Form
- Liquid
- pH
- 5.0 to 6.0 (20 °C)
- Density
- 1.080 g/cm3 (20 °C)
- Flashpoint
- Not applicable
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition
- No decomposition if used as directed.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
International Transportation
- Packing Group
- II
- Chemical Class
- 8
- UN Number
- 3264
- Harmonized System Code
- 38249996
- Grade : ULSI
- Color : Colorless
- Boiling Point/Range : > 100 °C (1,013 hPa)
- Melting Point/Range : No data available
- Odor : Odorless
- Physical Form : Liquid
- pH : 5.0 to 6.0 (20 °C)
- Density : 1.080 g/cm3 (20 °C)
- Flashpoint : Not applicable
- Chemical Stability : Stable under normal conditions.
- Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition : No decomposition if used as directed.
- Corrosivity : Corrosive to metals
- Ignition Temperature : Not applicable
- Packing Group : II
- Chemical Class : 8
- UN Number : 3264
- Harmonized System Code : 38249996
Property
Value
assay of NH4F
22.8 - 23.4 %
assay of HF
4.70 - 5.10 %
particles > 0,2 µm
Max. 250 P/ml
particles > 0,5 µm
Max. 30 P/ml
silver (Ag)
Max. 5 ppb
aluminium (Al)
Max. 10 ppb
gold (Au)
Max. 5 ppb
arsenic (As)
Max. 5 ppb
boron (B)
Max. 10 ppb
barium (Ba)
Max. 10 ppb
beryllium (Be)
Max. 5 ppb
bismuth (Bi)
Max. 10 ppb
calcium (Ca)
Max. 10 ppb
cadmium (Cd)
Max. 5 ppb
cobalt (Co)
Max. 5 ppb
chromium (Cr)
Max. 10 ppb
copper (Cu)
Max. 10 ppb
iron (Fe)
Max. 10 ppb
germanium (Ge)
Max. 5 ppb
gallium (Ga)
Max. 5 ppb
potassium (K)
Max. 10 ppb
lithium (Li)
Max. 5 ppb
magnesium (Mg)
Max. 10 ppb
manganese (Mn)
Max. 10 ppb
molybdenum (Mo)
Max. 10 ppb
sodium (Na)
Max. 10 ppb
niobium (Nb)
Max. 5 ppb
nickel (Ni)
Max. 5 ppb
lead (Pb)
Max. 10 ppb
tin (Sn)
Max. 10 ppb
strontium (Sr)
Max. 5 ppb
tantalum (Ta)
Max. 10 ppb
titanium (Ti)
Max. 10 ppb
thallium (Tl)
Max. 5 ppb
vanadium (V)
Max. 5 ppb
zinc (Zn)
Max. 10 ppb
zirconium (Zr)
Max. 5 ppb