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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (17053)

AF 90-10 ULSI Puranal

General Information

  • Grade
    • ULSI

Physical Properties

  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.115 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264

General Information

  • Grade
    • ULSI

Physical Properties

  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.115 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264
  • Grade : ULSI
  • Melting Point/Range : No data available
  • Solubility in Water : Completely miscible
  • Boiling Point/Range : > 100 °C (1,013 hPa)
  • Color : Colorless
  • Physical Form : Liquid
  • Flashpoint : Not applicable
  • Density : 1.115 g/cm3 (20 °C)
  • pH : Acidic
  • Odor : Stinging
  • Thermal Decomposition : No decomposition if used as directed.
  • Ignition Temperature : Not applicable
  • Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Corrosivity : Corrosive to metals
  • Chemical Stability : Stable under normal conditions.
  • Chemical Class : 8
  • UN Number : 3264
  • Harmonized System Code : 38249996
  • Packing Group : II
Property
Value
assay of NH4F
35.3 - 36.3 %
assay hydrofluoric acid (HF)
5.1 - 5.5 %
silver (Ag)
Max. 10 ppb
aluminium (Al)
Max. 10 ppb
arsenic, antimony (as As)
Max. 10 ppb
gold (Au)
Max. 10 ppb
barium (Ba)
Max. 20 ppb
beryllium (Be)
Max. 20 ppb
bismuth (Bi)
Max. 20 ppb
calcium (Ca)
Max. 10 ppb
cadmium (Cd)
Max. 20 ppb
cobalt (Co)
Max. 10 ppb
chromium (Cr)
Max. 5 ppb
copper (Cu)
Max. 5 ppb
iron (Fe)
Max. 5 ppb
gallium (Ga)
Max. 10 ppb
germanium (Ge)
Max. 10 ppb
potassium (K)
Max. 5 ppb
lithium (Li)
Max. 10 ppb
magnesium (Mg)
Max. 10 ppb
manganese (Mn)
Max. 10 ppb
molybdenum (Mo)
Max. 10 ppb
sodium (Na)
Max. 5 ppb
niobium (Nb)
Max. 20 ppb
nickel (Ni)
Max. 10 ppb
lead (Pb)
Max. 10 ppb
tin (Sn)
Max. 10 ppb
strontium (Sr)
Max. 10 ppb
tantalum (Ta)
Max. 20 ppb
titanium (Ti)
Max. 10 ppb
thallium (Tl)
Max. 20 ppb
vanadium (V)
Max. 10 ppb
zinc (Zn)
Max. 5 ppb
zirconium (Zr)
Max. 10 ppb
chloride (Cl)
Max. 2 ppm
nitrate (NO3)
Max. 0.8 ppm
phosphate (PO4)
Max. 0.6 ppm
sulfate (SO4)
Max. 1.5 ppm