Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17043)
AF 500:1 ULSI Puranal
Overview
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Specifications
General Information
- CAS Number
- 12125-01-8
- Grade
- ULSI
Physical Properties
- Density
- 1.11 g/cm3 (20 °C)
- Melting Point/Range
- No data available
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Odor
- Odorless
- Color
- Colorless
- Partition Coefficient
- No data available
- pH
- 6.2 to 7.0 (20 °C)
- Flashpoint
- Not applicable
- Physical Form
- Liquid
Safety Information
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Not corrosive to metals
International Transportation
- Harmonized System Code
- 38249996
- Chemical Class
- 6.1
- UN Number
- 3287
- Packing Group
- III
General Information
- CAS Number
- 12125-01-8
- Grade
- ULSI
Physical Properties
- Density
- 1.11 g/cm3 (20 °C)
- Melting Point/Range
- No data available
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Odor
- Odorless
- Color
- Colorless
- Partition Coefficient
- No data available
- pH
- 6.2 to 7.0 (20 °C)
- Flashpoint
- Not applicable
- Physical Form
- Liquid
Safety Information
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Not corrosive to metals
International Transportation
- Harmonized System Code
- 38249996
- Chemical Class
- 6.1
- UN Number
- 3287
- Packing Group
- III
- CAS Number : 12125-01-8
- Grade : ULSI
- Density : 1.11 g/cm3 (20 °C)
- Melting Point/Range : No data available
- Boiling Point/Range : > 100 °C (1,013 hPa)
- Odor : Odorless
- Color : Colorless
- Partition Coefficient : No data available
- pH : 6.2 to 7.0 (20 °C)
- Flashpoint : Not applicable
- Physical Form : Liquid
- Ignition Temperature : Not applicable
- Incompatible Materials : Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Chemical Stability : Stable under normal conditions.
- Corrosivity : Not corrosive to metals
- Harmonized System Code : 38249996
- Chemical Class : 6.1
- UN Number : 3287
- Packing Group : III
Property
Value
particles > 0,5 µm
Max. 125 P/ml
ammonium fluoride (NH4F)
39.3 - 40.3 %
assay hydrofluoric acid (HF)
0.100 - 0.120 %
silver (Ag)
Max. 1.0 ppb
aluminium (Al)
Max. 10 ppb
arsenic (As)
Max. 30 ppb
gold (Au)
Max. 1.0 ppb
boron (B)
Max. 50 ppb
barium (Ba)
Max. 10 ppb
bismuth (Bi)
Max. 10 ppb
calcium (Ca)
Max. 10 ppb
cadmium (Cd)
Max. 10 ppb
cobalt (Co)
Max. 10 ppb
chromium (Cr)
Max. 10 ppb
copper (Cu)
Max. 1.0 ppb
iron (Fe)
Max. 10 ppb
gallium (Ga)
Max. 10 ppb
indium (In)
Max. 10 ppb
potassium (K)
Max. 10 ppb
lithium (Li)
Max. 10 ppb
magnesium (Mg)
Max. 10 ppb
manganese (Mn)
Max. 10 ppb
molybdenum (Mo)
Max. 10 ppb
sodium (Na)
Max. 10 ppb
nickel (Ni)
Max. 10 ppb
lead (Pb)
Max. 10 ppb
platinum (Pt)
Max. 1.0 ppb
antimony (Sb)
Max. 30 ppb
tin (Sn)
Max. 10 ppb
tantalum (Ta)
Max. 10 ppb
titanium (Ti)
Max. 10 ppb
zinc (Zn)
Max. 10 ppb
chloride (Cl)
Max. 5.0 ppm
nitrate (NO3)
Max. 10.0 ppm
phosphate (PO4)
Max. 0.20 ppm
sulfate (SO4)
Max. 1.0 ppm
APHA
Max. 10