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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (17043)

AF 500:1 ULSI Puranal

General Information

  • CAS Number
    • 12125-01-8
  • Grade
    • ULSI

Physical Properties

  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.11 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Odorless
  • Partition Coefficient
    • No data available
  • pH
    • 6.2 to 7.0 (20 °C)
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Not corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked

International Transportation

  • Chemical Class
    • 6.1
  • Harmonized System Code
    • 38249996
  • Packing Group
    • III
  • UN Number
    • 3287

General Information

  • CAS Number
    • 12125-01-8
  • Grade
    • ULSI

Physical Properties

  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.11 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Odorless
  • Partition Coefficient
    • No data available
  • pH
    • 6.2 to 7.0 (20 °C)
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Not corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked

International Transportation

  • Chemical Class
    • 6.1
  • Harmonized System Code
    • 38249996
  • Packing Group
    • III
  • UN Number
    • 3287
  • Grade : ULSI
  • CAS Number : 12125-01-8
  • Partition Coefficient : No data available
  • Melting Point/Range : No data available
  • Solubility in Water : Completely miscible
  • Boiling Point/Range : > 100 °C (1,013 hPa)
  • Color : Colorless
  • Physical Form : Liquid
  • Flashpoint : Not applicable
  • Density : 1.11 g/cm3 (20 °C)
  • pH : 6.2 to 7.0 (20 °C)
  • Odor : Odorless
  • Ignition Temperature : Not applicable
  • Incompatible Materials : Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Corrosivity : Not corrosive to metals
  • Chemical Stability : Stable under normal conditions.
  • Chemical Class : 6.1
  • UN Number : 3287
  • Harmonized System Code : 38249996
  • Packing Group : III
Property
Value
particles > 0,5 µm
Max. 125 P/ml
ammonium fluoride (NH4F)
39.3 - 40.3 %
assay hydrofluoric acid (HF)
0.100 - 0.120 %
silver (Ag)
Max. 1.0 ppb
aluminium (Al)
Max. 10 ppb
arsenic (As)
Max. 30 ppb
gold (Au)
Max. 1.0 ppb
boron (B)
Max. 50 ppb
barium (Ba)
Max. 10 ppb
bismuth (Bi)
Max. 10 ppb
calcium (Ca)
Max. 10 ppb
cadmium (Cd)
Max. 10 ppb
cobalt (Co)
Max. 10 ppb
chromium (Cr)
Max. 10 ppb
copper (Cu)
Max. 1.0 ppb
iron (Fe)
Max. 10 ppb
gallium (Ga)
Max. 10 ppb
indium (In)
Max. 10 ppb
potassium (K)
Max. 10 ppb
lithium (Li)
Max. 10 ppb
magnesium (Mg)
Max. 10 ppb
manganese (Mn)
Max. 10 ppb
molybdenum (Mo)
Max. 10 ppb
sodium (Na)
Max. 10 ppb
nickel (Ni)
Max. 10 ppb
lead (Pb)
Max. 10 ppb
platinum (Pt)
Max. 1.0 ppb
antimony (Sb)
Max. 30 ppb
tin (Sn)
Max. 10 ppb
tantalum (Ta)
Max. 10 ppb
titanium (Ti)
Max. 10 ppb
zinc (Zn)
Max. 10 ppb
chloride (Cl)
Max. 5.0 ppm
nitrate (NO3)
Max. 10.0 ppm
phosphate (PO4)
Max. 0.20 ppm
sulfate (SO4)
Max. 1.0 ppm
APHA
Max. 10